Glass etching to bridge micro- and nanofluidics
Glass etching to bridge micro- and nanofluidics
复制标题
DOI：
10.1039/c1lc20741e
复制
发表时间：
2012-01-01
期刊：
影响因子：
6.1
通讯作者：
Chen, Hong-Yuan
中科院分区：
文献类型：
--
作者：
Xu, Bi-Yi;Yan, Xiao-Na;Chen, Hong-Yuan
在这项研究中，提出了一种连接微纳米结构的简单而经济的制备技术。采用玻璃微曝光法制作了具有微纳米结构的玻璃模具。微光刻为结构设计提供了灵活性，而玻璃刻蚀有助于将微玻璃脊转变为纳米级。在HF刻蚀过程中，利用玻璃的各向同性和顶层铬层的屏蔽作用，形成了横截面为三角形的玻璃脊形结构。由于边缘效应，进一步的刻蚀导致玻璃脊的高度从微米缩小到纳米。在后期刻蚀阶段，玻璃的几何变化大大减慢，这使得对玻璃脊的大小有更好的控制。采用玻璃结构模仿法，制备出重复性好、机械稳定性好、可调谐的聚二甲基硅氧烷(PDMS)通道和锥体。用扫描电子显微镜(SEM)和激光干涉法(LI)对微纳结构进行了表征。为了证明它们的可行性，将样品预富集到单个纳米通道级别。
In this study, a simple and economical fabrication technique bridging micro- and nanostructures is proposed. Glass molds with micro-nanostructures are fabricated by glass microlithography. The microlithography provides flexibility for structure design, and the glass etching contributes to transform the micro glass ridge to the nanoscale. Glass ridge structures with triangular cross sections are generated by undercutting, which coupled the isotropic character of glass and the shield effect of the top Cr layer upon HF etching. Further etching induced the height of the glass ridges to shrink from micro- to nanometres due to the edge effects. At the late etching stage, the geometrical change of the glass greatly slows down, which gives better control over the size of the glass ridge. By glass structure mold-copy, well repeatable, mechanically stable and tunable polydimethylsiloxane (PDMS) channels and cones are fabricated. Scanning electron microscopy (SEM) and laser interferometry (LI) are carried out to characterize the micro-nanostructures. To demonstrate their workability, sample preconcentration to a single nanochannel level is carried out.