High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate
High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate
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DOI：
10.7567/jjap.56.07jd13
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发表时间：
2017-06
影响因子：
1.5
通讯作者：
Masashi Gomi;T. Kataoka;Junki Hayashi;S. Kakio
中科院分区：
文献类型：
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作者：
Masashi Gomi;T. Kataoka;Junki Hayashi;S. Kakio
研究了泄漏表面声波（LSAWs）和纵向型LSAWs （LLSAWs）在高相速度下与at切割石英或c-平面蓝宝石（c-Al2O3）衬底结合的LiNbO3 （LN）或LiTaO3 （LT）薄板上的传播特性。从理论上揭示，当LN或LT薄板厚度小于一个波长时，llsaw的颗粒位移集中在薄板上，机电耦合系数（K2）增加到单一衬底时的2 ~ 3倍。此外，对于36°y形切割x传播的LT/c-Al2O3薄板厚度为0.35 λ和x形切割36°y传播的LN/c-Al2O3薄板厚度为0.19 λ，实验发现LSAW和LLSAW的K2值分别从单一衬底中的5.6和10.4%增加到薄板键合结构中的11.5和19.7%。
The propagation properties of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiNbO3 (LN) or LiTaO3 (LT) thin plate bonded to an AT-cut quartz or c-plane sapphire (c-Al2O3) substrate with a high phase velocity were investigated. It was theoretically revealed that when the LN or LT thin-plate thickness is less than one wavelength, the particle displacement of LLSAWs was concentrated in the thin plate and the electromechanical coupling factor (K2) was increased to two to three times that in the single substrate. Furthermore, for 36° Y-cut X-propagating LT/c-Al2O3 with an LT thin-plate thickness of 0.35 λ and X-cut 36° Y-propagating LN/c-Al2O3 with an LN thin-plate thickness of 0.19 λ, the values of K2 for an LSAW and an LLSAW were experimentally found to increase from 5.6 and 10.4% in the single substrate to 11.5 and 19.7% in the thin-plate bonded structure, respectively.