Surface Inductance of Superconductive Striplines
Surface Inductance of Superconductive Striplines
复制标题
超导带状线的表面电感
DOI：
10.1109/tcsii.2022.3156533
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
E. Friedman
中科院分区：
文献类型：
--
作者：
T. Jabbari;E. Friedman
超导电路中的电感在快速单磁通量子(RSFQ)系统中起着重要作用。电感估计是一个具有挑战性的问题。这些电感的微波特性是由一条线的表面电感来表征的。准确估计带状线表面电感的方法是本文的重点。给出了描述带状线的表面电感与线厚度、磁场和电流密度的关系的封闭形式的表达式。讨论了工艺参数变化对表面电感的影响。给出了带状线梯形几何效应的模型表达式。文中还给出了表面电感与氧化层和金属层厚度的关系。其目的是提供用于VLSI复杂RSFQ电路自动布线的表面电感的准确估计。
Inductance in superconductive circuits plays a significant role in rapid single flux quantum (RSFQ) systems. Inductance estimation is a challenging issue. The microwave behavior of these inductances is characterized by the surface inductance of a line. A methodology to accurately estimate the surface inductance of a stripline is the focus of this brief. A closed-form expression describing the dependence of the surface inductance of a stripline on the line thickness, magnetic field, and current density is provided. The effects of process parameter variations on the surface inductance are also discussed. An expression to model the effects of the trapezoidal geometry of a stripline is presented. The dependence of the surface inductance on the oxide and metal layer thicknesses is also presented. The objective is to provide an accurate estimate of the surface inductance for use in automated routing of VLSI complexity RSFQ circuits.