Comparative study on laser cleaning SiO2 particle on SrTiO3 and Si surfaces
Comparative study on laser cleaning SiO2 particle on SrTiO3 and Si surfaces
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DOI：
10.1063/5.0080911
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发表时间：
2022-05
期刊：
影响因子：
1.6
通讯作者：
Lingyan Wu;Aini Yang;Chi Ma;Jun He;Lejun Yu;Bo Sun;T. Ma;R. Dou;J. Nie;C. Xiong
中科院分区：
文献类型：
--
作者：
Lingyan Wu;Aini Yang;Chi Ma;Jun He;Lejun Yu;Bo Sun;T. Ma;R. Dou;J. Nie;C. Xiong
本文对干式激光清洗钛酸锶(STO)和硅单晶衬底表面的SiO_2颗粒进行了实验和理论上的比较研究。首先，实验研究了激光能量密度、脉冲数和二氧化硅颗粒尺寸对清洗效率的影响。结果表明，激光清洗阈值随SiO_2颗粒尺寸的增大而降低。此外，对于相同尺寸的SiO_2颗粒，STO表面的激光清洗阈值大于Si的激光清洗阈值。然后，在分析光场、粒子和衬底材料相互作用的基础上，提出了定量化的场增强效应修正热膨胀模型，较好地模拟了激光清洗阈值与粒子尺寸和衬底材料的关系。这些结果进一步加深了我们对激光干洗，特别是氧化物表面清洗过程的理解。
In this paper, we perform a comparative study, both experimentally and theoretically, on the dry laser cleaning SiO2 particles on the surface of SrTiO3 (STO) and Si single crystal substrates. Firstly, the dependences of the cleaning efficiency on the laser energy density, the pulse number, and the size of SiO2 particles was investigated experimentally. It is found that the laser cleaning threshold decreases with the increase of SiO2 particle size. Furthermore, for the same size of SiO2 particles, the laser cleaning threshold of the STO surface is larger than that of Si. Then, based on the analysis of the interactions among the light field, the particles, and the substrate material, a corrected thermal expansion model with a quantified field enhancement effect was proposed, which provides a good simulation of the dependence of the laser cleaning threshold on the particle size and the substrate. These results further deepen our understanding of the laser dry cleaning, particularly the cleaning process on the oxide surface.