A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect
A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect
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DOI：
10.3390/mi11010095
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发表时间：
2020-01-01
期刊：
影响因子：
3.4
通讯作者：
Wu, Wengang
中科院分区：
文献类型：
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作者：
Chen, Xiaoyu;Xia, Yuyu;Wu, Wengang
由于其独特的电磁特性，元原子阵列一直是实现各种特殊功能的研究热点，近年来对元原子结构的研究已从二维(2D)扩展到三维(3D)。随着对复杂三维元原子阵列的不断追求，对更高效、更精确的纳米制造方法的需求日益增长，遇到了挑战。为了探索更好的制备方法，我们提出了一种基于聚焦离子束应力诱导变形效应的复杂三维元原子阵列的可编程纳米加工方法，并设计了一个由周期性三维元原子组成的独特的纳米结构阵列来演示该方法。在所设计的三维元原子阵列制备成功后，利用扫描阴极发光(CL)显微成像和傅里叶变换红外光谱(FTIR)对阵列的电场/磁场特性和红外光谱特性进行了测量，发现在近8微米的偏振入射红外光诱导出了一定的激发模式。该方法除了具有复杂三维元原子的可编程性和材料的广泛适用性外，更显著的优点是可以准并行地加工由复杂的三维元原子组成的大规模阵列，大大提高了加工效率和单元单元的一致性。
Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D meta-atom arrays, the increasing demand for more efficient and more precise nanofabrication methods has encountered challenges. To explore better fabrication methods, we presented a programmable nanofabrication method for a complex 3D meta-atom array based on focused-ion-beam stress-induced deformation (FIB-SID) effect and designed a distinctive nanostructure array composed of periodic 3D meta-atoms to demonstrate the presented method. After successful fabrication of the designed 3D meta-atom arrays, measurements were conducted to investigate the electric/magnetic field properties and infrared spectral characteristics using scanning cathodoluminescence (CL) microscopic imaging and Fourier transform infrared (FTIR) spectroscopy, which revealed a certain excitation mode induced by polarized incident IR light near 8 mu m. Besides the programmability for complex 3D meta-atoms and wide applicability of materials, a more significant advantage of the method is that a large-scale array composed of complex 3D meta-atoms can be processed in a quasi-parallel way, which improves the processing efficiency and the consistency of unit cells dramatically.