MEMS Tactile Display with Hydraulic Displacement Amplification Mechanism

MEMS Tactile Display with Hydraulic Displacement Amplification Mechanism
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具有液压位移放大机构的 MEMS 触觉显示器

DOI:
10.1109/memsys.2009.4805420
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发表时间:
2009
期刊:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
影响因子:
--
通讯作者:
N. Miki
N. Miki
中科院分区:
--
文献类型:
--
作者:
T. Ninomiya;K. Osawa;Y. Okayama;Y. Matsumoto;N. Miki

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触觉显示器机械地刺激指垫上的触觉感受器。它们需要能够产生大于100 μ m的位移的微致动器阵列。我们提出了一种基于MEMS的触觉显示与液压位移放大机构(HDAM)。HDAM包含微腔,这些微腔在接触部分和驱动部分之间具有不同的横截面积,并且用可大变形的薄PDMS(聚二甲基硅氧烷)膜封装不可压缩的甘油。施加到驱动部件的位移在接触部件处被放大,该放大与驱动部件与接触部件的横截面积的比率相关联。制备了HDAM,并实现了7倍的扩增。我们成功地演示了盲文密码。
Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 ¿m. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.
DOI: --
发表时间: 2007
期刊: Robotica Vol. 25
影响因子: --
作者:
M. Ohka;H. Koga;Y. Mouri;T. Sugiura;T. Miyaoka and Y. Mitsuya
通讯作者: T. Miyaoka and Y. Mitsuya