Fabrication of diamond films at low temperature by pulse modulated magnetoactive microwave plasma CVD: "A.Hatta,H.Suzuki,K.Kadota,H.Makita,T.Ito and A.Hiraki" Plasma Sources Sci.and Technol.,. 5(in press). (1996)
Fabrication of diamond films at low temperature by pulse modulated magnetoactive microwave plasma CVD: "A.Hatta,H.Suzuki,K.Kadota,H.Makita,T.Ito and A.Hiraki" Plasma Sources Sci.and Technol.,. 5(in press). (1996)
复制标题
通过脉冲调制磁活性微波等离子体 CVD 低温制备金刚石薄膜:“A.Hatta、H.Suzuki、K.Kadota、H.Makita、T.Ito 和 A.Hiraki” Plasma Sources Sci.and Technol.,。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: