The Evolution of Growth, Crystal Orientation, and Grain Boundaries Disorientation Distribution in Gold Thin Films
The Evolution of Growth, Crystal Orientation, and Grain Boundaries Disorientation Distribution in Gold Thin Films
复制标题
DOI：
10.1002/crat.201800038
复制
发表时间：
2018-08
影响因子：
1.5
通讯作者：
Prakash Parajuli;R. Mendoza-Cruz;U. Santiago;A. Ponce;M. Yacamán
中科院分区：
文献类型：
--
作者：
Prakash Parajuli;R. Mendoza-Cruz;U. Santiago;A. Ponce;M. Yacamán
本文利用自动晶体取向成像（ACOM-TEM）技术系统地研究了金薄膜的生长和退火效应。由于再结晶和晶粒动力学过程中的晶粒和边界的晶体学再分布和结构变化进行了跟踪和描述。生长态薄膜显示出主导织构，随后是、和取向;退火后，晶粒沿平行于电子束的方向沿着明显重新取向，以及预期的晶粒尺寸增大。此外，在退火后，在生长的膜中观察到的随机大角度晶界向低重合位置晶格（CSL）边界转变。根据实验结果讨论了再结晶和晶粒动力学过程，主要是晶粒旋转和耦合晶界迁移对薄膜结构性能演变的影响。
Herein, the growth and annealing effect of gold thin films are systematically studied by using an automated crystal orientation mapping (ACOM–TEM) technique. The crystallographic redistribution and structural changes in grain and boundaries due to recrystallization and grain kinetic processes are followed and described. The as‐grown films show a dominant texture followed by , , , , and orientations; having a noticeable reorientation of the grains after annealing along the direction parallel to the electron beam, as well as the expected grain size enlargement. Moreover, the random high angle grain boundaries observed in as‐grown film transform towards low coincidence site lattice (CSL) boundaries after annealing. The consequences of recrystallization and grain kinetic processes, primarily grain rotation and coupled grain boundary migration on the evolution of the film structural properties are discussed based on the experimental results.