Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings
Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings
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DOI：
10.1364/ao.457479
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发表时间：
2022-06-20
期刊：
影响因子：
1.9
通讯作者：
Li, Mengwei
中科院分区：
文献类型：
--
作者：
Jin, Liming;Wang, Ce;Li, Mengwei
本文介绍了一种基于双层衍射光栅塔尔博特效应的微光机电系统（MOEMS）加速度计的设计、制作和测试。利用双层光栅近场衍射塔尔博特成像的高灵敏位移特性，实现了加速度的检测。为了获得光学干涉检测的最佳对比度，通过时域有限差分法（FDTD）仿真对光栅的参数进行了优化。实验结果表明，该MOEMS加速度计的分辨率为246 μ g，灵敏度为6.1 V/g，零偏稳定度为0.02 mg.所提出的加速度计可以在更高的加速度（类似于80 g）下操作，这显示出用于需要检测强烈和快速振动的应用中的显著潜力，特别是在车辆的振动感测和地球物理地震感测中的真实的时间。(C)2022光学出版集团
In this paper, we present the design, fabrication, and test of a micro-opto-electro-mechanical systems (MOEMS) accelerometer based on the Talbot effect of double-layer diffraction gratings. The detection of acceleration is realized by using the highly sensitive displacement characteristic of Talbot imaging of near-field diffraction with double-layer gratings. For the purpose of obtaining optimal contrast of the optical interferometric detection, the parameters of the gratings are optimized by the finite-difference time-domain (FDTD) simulation. The experimental results indicate that this MOEMS accelerometer with the proposed design can achieve a resolution of 246 mu g, sensitivity of 6.1 V/g, and bias stability of 0.02 mg. The proposed accelerometer can be operated at higher accelerations (similar to 80 g), which shows significant potential for being used in applications that require detection of strong and fast vibrations, especially in vibration sensing of vehicles and geophysical seismic sensing in real time. (C) 2022 Optica Publishing Group