Spectroscopic ellipsometry analysis of multilayered TiO2‐Ag thin films for photochromic application
Spectroscopic ellipsometry analysis of multilayered TiO2‐Ag thin films for photochromic application
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用于光致变色应用的多层 TiO2-Ag 薄膜的光谱椭圆光度分析
DOI：
10.1002/pssc.200777759
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
Gaobo Xu
中科院分区：
文献类型：
--
作者：
L. Miao;T. Jiang;S. Tanemura;M. Tanemura;N. Nabatova;Gaobo Xu
通过改变金属颗粒的周围介质，可以定制表面等离子体共振的波长，这提供了利用等离子体共振相关现象，如光致变色的潜力。采用射频磁控溅射法在石英衬底上制备了不同厚度的TiO_2/Ag/TiO_2夹心膜和TiO_2/Ag包覆膜。利用椭圆偏振光谱法对TiO_2-Ag多层膜的结构和各层负载金属Ag的浓度进行了高精度的测定。得到了各层的光谱相关介电函数，分别表现出典型的半导体TiO 2、金属Ag和TiO 2-Ag混合物的介电行为。观察到几个极薄的混合物层的表面等离子体共振峰。当Ag含量从35%增加到50%时，SPR峰从700 nm明显红移到780 nm。在样品1中，低浓度的Ag嵌入到TiO 2介质中，发现SPR峰在层3处变宽。（© 2008 WILEY-VCH Verlag GmbH & Co. KGaA，魏因海姆）
By altering the surrounding media of metal particles, the wavelength of surface plasma resonance can be tailored, which offers the potential for utilizing of plasma resonance related phenomenon, such as photochromism. Both sandwiched (TiO2/Ag/TiO2) and overcoated (TiO2/Ag) films with different thicknesses were deposited on quartz substrate by rf helicon magnetron sputtering method. The structure of multilayered TiO2-Ag films and the concentration of loaded metal Ag in each layer were determined by spectroscopic ellipsometry in high accuracy. The spectral dependent dielectric functions of each layer were obtained, which exhibited typical semiconductor TiO2, metal Ag and mixture TiO2-Ag behaviors, respectively. The surface plasma resonance peak was observed for several extremely thin mixture layers. The apparent redshift of SPR peak from 700 nm to 780 nm was happened with increasing of Ag amount from 35% to 50%. The broadening of SPR peak was found for layer 3 in sample 1 with low concentration Ag embedded in TiO2 media. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)