Nanoelectromechanical devices for sensing applications
Nanoelectromechanical devices for sensing applications
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DOI：
10.1016/j.snb.2006.10.049
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发表时间：
2007-09
影响因子：
8.4
通讯作者：
V. Cimalla;F. Niebelschütz;K. Tonisch;C. Foerster;K. Brueckner;I. Cimalla;T. Friedrich;J. Pezoldt;R. Stephan;M. Hein;O. Ambacher
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文献类型：
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作者：
V. Cimalla;F. Niebelschütz;K. Tonisch;C. Foerster;K. Brueckner;I. Cimalla;T. Friedrich;J. Pezoldt;R. Stephan;M. Hein;O. Ambacher
共振纳机电系统（NEMS）是一类新型超快、高灵敏度器件的有前途的器件。在这项工作中，制造，操作，以及陶瓷宽带隙（AlN和SiC）NEMS传感器的传感性能将被证明。这种梁的内部应变可用于改善装置的谐振性能。特别注意此类传感器在空气中的操作，空气代表粘性介质，并将NEMS谐振器的品质因子从真空中的104至105大幅降低到空气中的10-300。这种固有特性限制了在空气中应用的灵敏度，在传感器的设计中必须考虑到这一点。对于这样的谐振器，将更详细地讨论在粘性介质中操作的主要问题，并且示例性地展示质量负载、温度和压力的感测特性。
Resonant nanoelectromechanical systems (NEMS) are promising devices for a new class of ultrafast, highly sensitive devices. In this work, fabrication, operation, as well as sensing properties of ceramic wide band gap (AlN and SiC) NEMS sensors will be demonstrated. The internal strain of such beams can be used to improve the resonant performance of the devices. Special attention is drawn to the operation of such sensors in air, which represents a viscous medium and reduces drastically the quality factor of NEMS resonators from 104to 105in vacuum to 10–300 in air. This intrinsic property limits the sensitivity for applications in air and has to be taken into account in the design of the sensors. For such resonators, the main problems for an operation in viscous media will be discussed in more detail, and the sensing properties for mass loading, temperature and pressure are exemplarily demonstrated.