Effect of seed layers on the performance of planar spiral microinductors
Effect of seed layers on the performance of planar spiral microinductors
复制标题
种子层对平面螺旋微电感器性能的影响
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
A. Walton
中科院分区：
文献类型：
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作者：
R. Walker;E. Sirotkin;J. Terry;S. Smith;M. Desmulliez;A. Walton
本文研究了平面功率微电感中磁性种子层对电感电性能的影响。这些研究涉及电沉积在非磁性和磁性种子层（即分别为铜和镍）上的Ni80Fe20薄膜的结构和磁性表征。用微电子力学测试结构和X射线分析方法研究了在铜和镍籽晶层上电沉积的Ni_（80）Fe_（20）薄膜的应力水平和结构特性。此外，平面螺旋微电感器，图案化的磁芯，已被制造，以确认从磁性种子层的电气性能的改善，作为增强的磁性和电阻的贡献的结果。
This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.