Structure-property relations in ZrCN coatings for tribological applications
Structure-property relations in ZrCN coatings for tribological applications
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DOI：
10.1016/j.surfcoat.2010.08.126
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发表时间：
2010-12
影响因子：
5.4
通讯作者：
E. Silva;M. R. Figueiredo;R. Franz;R. Galindo;C. Palacio;A. Espinosa;C. Mitterer;S. Carvalho
中科院分区：
文献类型：
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作者：
E. Silva;M. R. Figueiredo;R. Franz;R. Galindo;C. Palacio;A. Espinosa;C. Mitterer;S. Carvalho
采用直流反应磁控溅射法在2 ~ 10 sccm的氮气流量下制备了ZrCN涂层，研究了氮的引入对ZrCN涂层结构和性能的影响。通过辉光放电发射光谱和卢瑟福背散射光谱获得有关化学组成的信息。通过X射线衍射研究的晶体结构的演变揭示了形成的面心立方ZrCN相N2流量大于4sccm。此外，通过拉曼光谱和X射线光电子能谱可以证明在具有最高N2流量的涂层中存在非晶相。该相可以作为润滑剂，导致低摩擦系数，如所进行的球盘测试中所示。纳米压痕测量表明，涂层沉积与6sccm N2流量具有最大的硬度，这也揭示了最好的性能，在进行干切削试验。
ZrCN coatings were deposited by dc reactive magnetron sputtering with N2flows ranging from 2 to 10sccm in order to investigate the influence of the nitrogen incorporation on structure and properties. Information about the chemical composition was obtained by glow discharge optical emission spectroscopy and Rutherford backscattering spectroscopy. The evolution of the crystal structure studied by X-ray diffraction revealed the formation of a face-centred cubic ZrCN phase for N2flows greater than 4sccm. Additionally, the presence of an amorphous phase in the coatings deposited with the highest N2flows could be evidenced by Raman spectroscopy and X-ray photoelectron spectroscopy. This phase can act as a lubricant resulting in a low coefficient of friction as shown in the conducted ball-on-disc tests. Nanoindentation measurements showed that coatings deposited with a 6sccm N2flow had the maximum hardness which also revealed the best performance in the conducted dry cutting tests.