A scanning soft x-ray microscope with an ellipsoidal focusing mirror.
A scanning soft x-ray microscope with an ellipsoidal focusing mirror.
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DOI：
10.3233/xst-1992-3202
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发表时间：
1992-01-01
影响因子：
3
通讯作者：
Wongel, H
中科院分区：
文献类型：
--
作者：
Voss, J;Dadras, H;Wongel, H
我们开发并投入运行了一种新型扫描软 X 射线显微镜，它可以在 20 至 1300 eV 的任何光子能量下工作。该显微镜通过椭圆面镜的环形部分将光阑缩小到目前最小的光斑尺寸，约为 0.4 μm (FWHM)，当然仅包含总强度的一小部分。样品在该点上被扫描。反射镜和焦点之间有 30 毫米的自由空间可供探测器使用，从与法线成 30° 以上的表面发射的粒子可以被提取到质量或能量分析仪中。透射、光发射、发光、光刺激解吸、反射率和其他信号可用于成像。此外，对非常小的样品或样品上的斑点进行静态分析将变得可行。
We have developed and brought into operation a new type of scanning soft x-ray microscope which can operate at any photon energy from 20 to 1300 eV. This microscope demagnifies a diaphragm by means of an annular section of an ellipsoidal mirror to a smallest spot size of, at present, about 0.4 mum (FWHM), certainly containing only a small fraction of the total intensity. The sample is scanned across this spot. Between mirror and focus a free space of 30 mm is available for detectors, and particles emitted from a surface at more than 30° to the normal can be extracted into a mass or energy analyzer. Transmission, photoemission, luminescence, photostimulated desorption, reflectivity, and other signals may serve for imaging. In addition, a static analysis of very small samples or spots on a sample will become feasible.