Electronic and nuclear thermal spike effects in sputtering of metals with energetic heavy ions -: art. no. 155414
Electronic and nuclear thermal spike effects in sputtering of metals with energetic heavy ions -: art. no. 155414
复制标题
DOI：
10.1103/physrevb.67.155414
复制
发表时间：
2003-04-15
影响因子：
3.7
通讯作者：
Toulemonde, M
中科院分区：
文献类型：
--
作者：
Mieskes, HD;Assmann, W;Toulemonde, M
在电子能量损失占主导地位的能量下，用重离子测量了纯金属的溅射产额和典型角分布。在不同的离子电荷状态和离子/能量组合下，在溅射金属Ti和Zr时观察到电子效应，而对Au没有观察到电子效应。非弹性热峰模型被扩展到计算粒子从离子径迹蒸发的溅射，然而，为了再现测量的产额，除了电子碰撞(核)尖峰效应外，还必须考虑电子碰撞(核)尖峰效应。结果表明，在这种能量条件下，两种加热机制对溅射的重要性和协同性。
Sputtering yields and typical angular distributions of pure metals were measured with heavy ions at energies where electronic energy loss dominates. Using different ion charge states and ion/energy combinations, electronic effects were observed in sputtering of metals such as Ti and Zr, but not for Au. An inelastic thermal spike model was extended to calculate sputtering by particle evaporation from an ion track, however, to reproduce the measured yields, besides electronic also elastic collision (nuclear) spike effects had to be included. The results demonstrate the importance and synergism of both heating mechanisms for sputtering in this energy regime.