Automated Electron Backscatter Diffraction: Present State and Prospects
Automated Electron Backscatter Diffraction: Present State and Prospects
复制标题
自动电子背散射衍射：现状与前景
DOI：
--
复制
发表时间：
2000
期刊：
影响因子：
--
通讯作者：
R. Schwarzer
中科院分区：
文献类型：
--
作者：
R. Schwarzer
电子背散射衍射（EBSD），或更准确地说，背散射菊池衍射（BKD），在扫描电子显微镜（SEM），使个别晶粒取向，局部纹理和点对点的取向相关性，以确定常规的散装表面上的多晶材料。在过去的几年里，由于SEM的广泛应用，易于从散装样品制备，以及可以获得有关亚微米尺度微观结构的补充信息，该技术在材料科学中迅速被接受（Randle，1992; Schwarzer，1997 a）。几种易于使用的技术相结合，使扫描电镜成为物理学家和地球科学家手中功能强大且几乎通用的分析仪器。从相同的试样面积，表面配置和微观结构的形态感知非常详细的救济和取向对比度在二次和背散射电子图像，元素分布的EDS或阴极射线发光分析访问，和单个晶粒和相的取向，现在可以确定，作为补充，由EBSD。
Electron backscatter diffraction (EBSD), or more precisely backscatter Kikuchi diffraction (BKD), in the SEM enables individual grain orientations, local texture and point-to-point orientation correlations to be determined routinely on bulk surfaces of polycrystalline materials. The technique has found rapid acceptance in materials science within the last few years (Randle, 1992; Schwarzer, 1997a) due to the wide availability of SEMs, the ease of sample preparation from the bulk, and the access to complementary information about the microstructure on a submicron scale. The combination of several easy-to-use techniques makes the SEM a powerful and almost universal analytical instrument in the hands of the physical metallurgist as well as the earth scientist. From the same specimen area, surface configuration and morphology of micro structure are perceived in great detail by the relief and orientation contrast in secondary and backscatter electron images, element distributions are accessed by EDS or cathodoluminescence analysis, and the orientations of single grains and phases can now be determined, as a complement, by EBSD.