Lithographic applications of conducting polymers
Lithographic applications of conducting polymers
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导电聚合物的光刻应用
DOI：
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发表时间：
1991
期刊：
影响因子：
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通讯作者：
M. Tissier
中科院分区：
文献类型：
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作者：
M. Angelopoulos;J. Shaw;K. Lee;Wu;M. Lecorre;M. Tissier
发现导电聚苯胺适用于几种光刻应用。由于聚苯胺在导电状态下不明显可溶，因此该材料通常是通过首先应用可溶的、不导电的材料版本，然后在第二步中在聚合物薄膜外部掺杂含水酸来处理的。我们通过开发在聚合物中以干燥方式原位诱导掺杂的方法，消除了对这种类型的外部掺杂的需要。这是通过在聚苯胺中掺入铵盐或三酸胺盐来实现的，聚苯胺分别在辐射或热处理后分解，产生活性掺杂物质，即质子酸。这些原位掺杂剂的使用简化了导电聚苯胺的加工，使材料更便于光刻应用。通过使用铵盐，聚苯胺被制成高分辨率的负导阻片。0.25 μm导线…
Electrically conducting polyaniline is found to be suitable for several lithographic applications. Because the polyaniline is not significantly soluble in the conducting state, the material has generally been processed by first applying the soluble, nonconducting version of the material, and in a second step externally doping the polymer film with aqueous acids. We have eliminated the need for this type of external doping by developing methods of inducing the doping in a dry fashion in situ in the polymer. This is accomplished by incorporating onium salts or amine triflate salts in the polyaniline which decompose upon radiation or thermal treatment, respectively, to generate the active dopant species, i.e., protonic acids. The use of these in situ dopants simplifies the processing of the conducting polyaniline and makes the material more convenient for lithographic applications. With the use of onium salts, the polyaniline is made into a high resolution negative conducting resist. 0.25 μm conducting lines...