Numerical Simulation of Excimer Laser Cleaning of Film and Particle Contaminants
Numerical Simulation of Excimer Laser Cleaning of Film and Particle Contaminants
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DOI：
10.1115/1.4024836
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发表时间：
2013-12-01
影响因子：
--
通讯作者：
Dilworth, S.
中科院分区：
文献类型：
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作者：
Marimuthu, S.;Mhich, A.;Dilworth, S.
激光清洗是一种很有前途的表面处理技术，在高附加值制造业中有着广泛的应用前景。然而，了解激光处理参数对各种污染物和基材的影响，对于实现所需的清洁效果和质量至关重要。对航空合金激光清洗过程中的材料烧蚀特性和衬底热效应进行了二维瞬态数值模拟研究。采用元素生死法跟踪污染物在材料表面的去除情况。结果表明，污染物烧蚀随激光功率和脉冲数的增加而增加。有限元模型能够预测去除各种污染物所需的最佳脉冲数和激光功率。根据模拟结果，提出了准分子激光清洗的机理。因此，利用数值模拟方法可以更快、更经济地建立激光清洗的最佳窗口，减少实验测试次数。
Laser cleaning is a promising surface preparation technique for applications in high value manufacturing industries. However, understanding the effects of laser processing parameters on various types of contaminants and substrates, is vital to achieve the required cleaning efficacy and quality. In this paper, a two-dimensional transient numerical simulation was carried out to study the material ablation characteristics and substrate thermal effects in laser cleaning of aerospace alloys. Element birth and death method was employed to track the contaminant removal on the surface of the material. The result shows that contaminant ablation increases with laser power and number of pulses. The finite element method (FEM) model is capable enough to predict the optimum number of pulses and laser power required to remove various contaminants. Based on the simulation results, the mechanism of the excimer laser cleaning is proposed. Thus, the use of numerical simulation can be faster and cheaper method of establishing the optimum laser cleaning window and reducing the number of experimental tests.