Effect of the bias voltage on the structure of nc-CrC/a-C:H coatings with high carbon content
Effect of the bias voltage on the structure of nc-CrC/a-C:H coatings with high carbon content
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DOI：
10.1016/j.surfcoat.2011.12.015
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发表时间：
2012-02
影响因子：
5.4
通讯作者：
L. Yate;L. Martínez-de-Olcoz;J. Esteve;A. Lousa
中科院分区：
文献类型：
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作者：
L. Yate;L. Martínez-de-Olcoz;J. Esteve;A. Lousa
由硬质纳米碳化物相和a-C：H非晶基组成的纳米复合涂层因其具有高硬度、低摩擦系数和高耐磨性等力学性能和摩擦学性能而成为研究的热点。在Ar/C_2H_2混合气氛中，采用阴极真空电弧沉积技术，在硅衬底上制备了纳米碳化铬纳米复合涂层(NC-CRC/a-C：H)。采用线性磁屏蔽来降低薄膜中的大颗粒含量。在沉积过程中，对衬底施加了从50到450V的负偏压范围。X射线衍射分析表明，所有样品都形成了非晶态或纳米晶薄膜。用傅里叶变换红外光谱(FTIR)对材料中的氢键进行了研究。用X射线光电子能谱(XPS)、拉曼光谱和电子能量损失谱(EELS)研究了碳键和非晶态碳的存在。高分辨电子显微镜(HRTEM)显示了碳化铬纳米晶镶嵌在无定形碳氢化合物基质中的纳米复合结构。结果表明，负偏压对碳键和氢含量有显著影响。
Nanocomposite coatings consisting of a hard nanocrystalline carbide phase and a-C:H amorphous matrix are the focus of many investigations because of their mechanical and tribological properties such as high hardness, low friction coefficient and high resistance to wear. In this work, nanocomposite coatings of nanocrystalline chromium carbide embedded in an amorphous matrix (nc-CrC/a-C:H) were deposited onto silicon substrates by cathodic vacuum arc deposition using a Cr target in an Ar/C2H2gas mixture atmosphere. A linear magnetic shield was employed to reduce the macroparticle content in the films. A range of negative bias voltages from 50 to 450V was applied to substrates during deposition. X-ray diffraction (XRD) analysis showed that amorphous or nanocrystalline thin films were formed in all cases. The hydrogen bonding in the material was studied by Fourier transform infrared spectroscopy (FTIR). X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and electron energy loss spectroscopy (EELS) were used to determine the carbon bonding and to study the presence of different forms of amorphous carbon. High resolution transmission electron microscopy (HRTEM) revealed a nanocomposite structure with chromium carbide nanocrystallites embedded in an amorphous hydrocarbon matrix. It was observed that the negative bias voltage significantly affected the carbon bonding and the hydrogen content.