Development of depleted monolithic pixel sensors in 150 nm CMOS technology for the ATLAS Inner Tracker upgrade

Development of depleted monolithic pixel sensors in 150 nm CMOS technology for the ATLAS Inner Tracker upgrade
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采用 150 nm CMOS 技术开发耗尽型单片像素传感器,用于 ATLAS 内部跟踪器升级

DOI:
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发表时间:
2017
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通讯作者:
N. Wermes
N. Wermes
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文献类型:
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作者:
P. Rymaszewski;Marlon Barbero;S. Bhat;P. Breugnon;I. Caicedo;Zongde Chen;Y. Degerli;S. Godiot;F. Guilloux;C. Guyot;T. Hemperek;Toko Hirono;F. Hugging;Hans Kruger;M. Lachkar;P. Pangaud;A. Rozanov;P. Schwemling;M. Vandenbroucke;Tianyang Wang;N. Wermes

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本工作提出了一个耗尽单片有源像素传感器(DMAPS)的原型LFoundry 150 nm CMOS工艺制造。所描述的设备,名为LF-Monopix,被设计为一个完全单片传感器的概念证明,该传感器能够在高亮度大型强子对撞机(HL-LHC)的ATLAS内部跟踪器升级的外层环境中运行。与目前使用的混合设计相比,在检测器模块中实现这样的设备将导致更低的生产成本和更低的材料预算。在本文中,芯片架构将被描述其次是模拟和测量结果。
This work presents a depleted monolithic active pixel sensor (DMAPS) prototype manufactured in the LFoundry 150 nm CMOS process. The described device, named LF-Monopix, was designed as a proof of concept of a fully monolithic sensor capable of operating in the environment of outer layers of the ATLAS Inner Tracker upgrade for the High Luminosity Large Hadron Collider (HL-LHC). Implementing such a device in the detector module will result in a lower production cost and lower material budget compared to the presently used hybrid designs. In this paper the chip architecture will be described followed by the simulation and measurement results.