Round-robin measurements of toroidal window
Round-robin measurements of toroidal window
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环形窗口的循环测量
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
P. Dumas
中科院分区：
文献类型：
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作者：
K. Medicus;S. DeFisher;M. Bauza;P. Dumas
我们对自由形状环形窗口的表面不规则性测量进行了循环研究。测量工具包括 Optimax Systems, Inc. 的 Leitz 扫描 CMM、OptiPro Systems 的 UltraSurf、非接触式测量系统、OptiPro Systems 的 Zeiss 扫描 CMM、Carl Zeiss Industrial Metrology 的 F25 微型 CMM 以及 QED Technologies 的 ASI(Q)™。每个仪器都会生成 2.5D 表面误差图。将测量结果与多种分析设置进行比较。不同的分析设置消除了一些低频高度误差，这些误差在测量中有所不同。这突出表明需要进行更多研究来确定低频误差差异的原因。消除低频误差后，测量结果对比非常好，误差在 0.2 μm rms 以内。
We have performed a round-robin study of surface irregularity measurements of a free-form toroidal window. The measurement tools were a Leitz scanning CMM at Optimax Systems, Inc., an UltraSurf, a non-contact measuring system at OptiPro Systems, a Zeiss scanning CMM at OptiPro Systems, a F25 micro-CMM at Carl Zeiss Industrial Metrology, and an ASI(Q)™ at QED Technologies. Each instrument resulted in a 2.5D surface error map. The measurements were compared with multiple analysis settings. The different analysis settings removed some low frequency height errors, which varied amongst the measurements. This highlights the need for more study to determine the reasons for the differences in the low frequency errors. With the low frequency errors removed, the measurements compared very well, to within 0.2 μm rms.