Design and performance of a scanning ptychography microscope
Design and performance of a scanning ptychography microscope
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DOI：
10.1063/1.4868968
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发表时间：
2014-03-01
影响因子：
1.6
通讯作者：
Chu, Y. S.
中科院分区：
文献类型：
--
作者：
Nazaretski, E.;Huang, X.;Chu, Y. S.
我们已经设计并构建了一个专用的仪器来执行重叠关联测量和表征多层劳厄透镜纳米聚焦光学。扫描显微镜的设计提供了组件的稳定性和最小的热漂移，这是纳米级空间分辨率测量的要求。我们进行了彻底的实验室表征仪器的分辨率和热漂移与随后的测量在同步加速器。我们已经成功地获得和重建重叠关联数据产生11 nm线焦点。(C)2014 AIP Publishing LLC.
We have designed and constructed a dedicated instrument to perform ptychography measurements and characterization of multilayer Laue lenses nanofocusing optics. The design of the scanning microscope provides stability of components and minimal thermal drifts, requirements for nanometer scale spatial resolution measurements. We performed thorough laboratory characterization of the instrument in terms of resolution and thermal drifts with subsequent measurements at a synchrotron. We have successfully acquired and reconstructed ptychography data yielding 11 nm line focus. (C) 2014 AIP Publishing LLC.