A high resolution MEMS based gas chromatography column for the analysis of benzene and toluene gaseous mixtures
A high resolution MEMS based gas chromatography column for the analysis of benzene and toluene gaseous mixtures
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DOI：
10.1016/j.snb.2009.06.047
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发表时间：
2009-09
影响因子：
8.4
通讯作者：
Jianhai Sun;D. Cui;Yutai Li;Lulu Zhang;Jian Chen;Hui Li;Xing Chen
中科院分区：
文献类型：
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作者：
Jianhai Sun;D. Cui;Yutai Li;Lulu Zhang;Jian Chen;Hui Li;Xing Chen
报道了一种基于微机电系统（MEMS）技术的高分辨率气相色谱柱。采用深反应离子刻蚀（DRIE）技术制备了长6.0m、宽100μm、深100μm的圆柱体，并采用阳极键合技术用Pyrex 7740玻璃封接。用二甲基聚硅氧烷（OV-1）为固定相，在气相色谱柱上涂敷后，苯和甲苯在185 s内得到了成功分离。苯和甲苯的分离度为6.33，据我们所知，这高于任何以前报道的值。苯和甲苯的拖尾因子分别为1.13和1.20，甲苯的理论塔板数为4850。该系统适用于环境空气质量监测和工业废气分析的便携式设备。
his paper reports a high resolution gas chromatography (GC) column based on micro electro mechanical systems (MEMS) technology. This 6.0m long, 100μm wide, and 100μm deep column was fabricated using deep reactive-ion etching (DRIE) to form channels for gas separation, and the channels were sealed with Pyrex 7740 glass by using anode bonding. After the GC column was coated with dimethyl polysiloxane (OV-1) as the stationary phase, benzene and toluene were successfully separated in less than 185s. The resolution of benzene and toluene was 6.33, which was higher than any previously reported values to our best knowledge. The tailing factors of benzene and toluene were 1.13 and 1.20, respectively, and the number of theoretical plates of toluene was 4850. The system is applicable as a portable device for ambient air quality monitoring and industrial exhaust gas analysis.