Focused Ion Beam NanoSQUIDs as Novel NEMS Resonator Readouts
Focused Ion Beam NanoSQUIDs as Novel NEMS Resonator Readouts
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聚焦离子束 NanoSQUID 作为新型 NEMS 谐振器读数
DOI：
10.1109/tasc.2009.2019026
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发表时间：
2009
影响因子：
1.8
通讯作者：
Jie Chen
中科院分区：
文献类型：
--
作者：
L. Hao;J. Gallop;D. Cox;E. Romans;J. Macfarlane;Jie Chen
纳米机电系统(NEMS)是一类重要的新型器件，具有广泛的应用前景。本文报道了适用于宽温度范围的悬臂式NEMS谐振器的激励和读出的新方法的建议和计算。我们建议了一种基于洛伦兹力的激发方法，并讨论了由纳米SQUID提供的超灵敏读数，其中悬臂振动调制了纳米SQUID回路的电感，从而实现了潜在的亚皮秒振幅灵敏度。
Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. In this paper we report proposals and calculations for novel methods for excitation and readout of cantilever-style NEMS resonators which are applicable over a wide temperature range. We suggest a Lorentz force-based excitation method and discuss an ultrasensitive readout provided by a nanoSQUID, where the cantilever vibration modulates the inductance of the nanoSQUID loop, allowing potentially sub-picometer amplitude sensitivity to be achieved.