Deposition and wear resistance of Ti–B–N–C coatings on WC–Co cutting tools from alkoxide solutions by thermal plasma CVD
Deposition and wear resistance of Ti–B–N–C coatings on WC–Co cutting tools from alkoxide solutions by thermal plasma CVD
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DOI：
10.1016/j.surfcoat.2007.01.041
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发表时间：
2007-05
影响因子：
5.4
通讯作者：
S. Shimada;M. Takahashi;J. Tsujino;Isao Yamazaki;K. Tsuda
中科院分区：
文献类型：
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作者：
S. Shimada;M. Takahashi;J. Tsujino;Isao Yamazaki;K. Tsuda
采用Ar/N2/H2热等离子体化学气相沉积（CVD）方法，在四乙醇钛（TTEO）和三乙醇硼（BTEO）溶液中于800 °C下沉积TiN/TiBC双层涂层和TiBCN复合涂层20 min。双层涂层在Ar/N2/H2等离子体中沉积前10分钟，然后在Ar/H2等离子体中沉积另外10分钟。通过改变N2流量，在TTEO和BTEO摩尔比为1：2的混合溶液中制备了不同成分的TiBCN复合涂层。通过薄膜X射线衍射确定了涂层的晶相。利用扫描电镜对涂层的表面和横截面进行了观察，揭示了涂层的微观结构和厚度。涂层中Ti、N、B、结合和游离C和O的相对浓度由XPS峰面积半定量地确定。与商用TiN涂层相比，在WC-Co刀具上沉积的TiBCN复合涂层具有上级的抗后刀面磨损和抗弧坑磨损性能。
Double layered TiN/TiBC and composite TiBCN coatings were deposited on WC–Co cutting tools from titanium tetra-ethoxide (TTEO) and boron tri-ethoxide (BTEO) solutions at 800 °C for 20 min by chemical vapor deposition (CVD) in a thermal Ar/N2/H2plasma. The double layered coatings were deposited in Ar/N2/H2plasma for the first 10 min, followed by another 10 min deposition in Ar/H2plasma. The composite TiBCN coatings of various compositions were deposited from the mixed solutions of TTEO and BTEO at a 1:2 mole ratio by changing the N2flow rate. The crystalline phases of the coatings were identified by thin film X-ray diffraction. The surfaces and cross sections of the coatings were observed by SEM, revealing the microstructures and thickness of the coatings. The relative concentrations of Ti, N, B, bonded and free C, and O in the coatings were determined semi-quantitatively from the XPS peak areas. The composite TiBCN coatings deposited on WC–Co cutting tools exhibited superior flank and crater wear resistance compared with commercial TiN coatings.