“Silicon millefeuille” : From a silicon wafer to multiple thin crystalline films in a single step
“Silicon millefeuille” : From a silicon wafer to multiple thin crystalline films in a single step
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“硅千层酥”：一步完成从硅片到多层晶体薄膜的制作
DOI：
10.1063/1.4803009
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发表时间：
2013
影响因子：
4
通讯作者：
R. Alcubilla
中科院分区：
文献类型：
--
作者：
David Hernández;T. Trifonov;M. Garín;R. Alcubilla
在过去的几年中，已经开发了许多技术来从商业硅锭中获得薄膜。预计光伏领域将有巨大的市场应用，预计成本将显着降低，先进的微电子技术如三维集成、箔上系统或硅中介层也将出现[Dross et al., Prog. 2017]。光伏 20, 770-784 (2012); R. Brendel，薄膜晶体硅太阳能电池（Wiley-VCH，Weinheim，德国，2003 年）； J. N. Burghartz，超薄芯片技术与应用（Springer Science + 商业媒体，纽约，美国，2010 年）]。现有方法生产“一次一个”硅层，一旦获得一层薄膜，就重复整个过程以获得下一层。在这里，我们描述了一种技术，该技术可以在单个技术步骤中从单晶硅晶片生产大量厚度受控的晶体薄膜。
During the last years, many techniques have been developed to obtain thin crystalline films from commercial silicon ingots. Large market applications are foreseen in the photovoltaic field, where important cost reductions are predicted, and also in advanced microelectronics technologies as three-dimensional integration, system on foil, or silicon interposers [Dross et al., Prog. Photovoltaics 20, 770-784 (2012); R. Brendel, Thin Film Crystalline Silicon Solar Cells (Wiley-VCH, Weinheim, Germany 2003); J. N. Burghartz, Ultra-Thin Chip Technology and Applications (Springer Science + Business Media, NY, USA, 2010)]. Existing methods produce “one at a time” silicon layers, once one thin film is obtained, the complete process is repeated to obtain the next layer. Here, we describe a technology that, from a single crystalline silicon wafer, produces a large number of crystalline films with controlled thickness in a single technological step.