Automated Assembly of Wafer-Scale 2D TMD Heterostructures of Arbitrary Layer Orientation and Stacking Sequence Using Water Dissoluble Salt Substrates
Automated Assembly of Wafer-Scale 2D TMD Heterostructures of Arbitrary Layer Orientation and Stacking Sequence Using Water Dissoluble Salt Substrates
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DOI：
10.1021/acs.nanolett.0c01089
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发表时间：
2020-05-13
期刊：
影响因子：
10.8
通讯作者：
Jung, Yeonwoong
中科院分区：
文献类型：
--
作者：
Han, Sang Sub;Ko, Tae-Jun;Jung, Yeonwoong
我们报告了一种组装晶圆级二维（2D）过渡金属二硫属化物（TMD）层的新颖策略，该层具有明确的组件和方向。我们直接在“水溶性”单晶盐晶片上生长各种 2D TMD 层，并以化学良性方式在水中精确地分层它们。这种制造策略能够在对其种类和形状不敏感的特殊基板上自动集成垂直对齐的 2D TMD 层以及任意堆叠顺序的 2D/2D 异质层。此外，原始盐晶片可以回收用于额外的生长，从而证实了高工艺可持续性和可扩展性。通过为各种非传统应用开发概念验证的“全二维”设备，证明了这种方法的通用性和多功能性。这项研究被认为有助于利用 2D TMD 层的机会来实现工业所需规模的各种形状因素的大面积机械可重构设备。
We report a novel strategy to assemble wafer-scale two-dimensional (2D) transition metal dichalcogenide (TMD) layers of well-defined components and orientations. We directly grew a variety of 2D TMD layers on "water-dissoluble" single-crystalline salt wafers and precisely delaminated them inside water in a chemically benign manner. This manufacturing strategy enables the automated integration of vertically aligned 2D TMD layers as well as 2D/2D heterolayers of arbitrary stacking orders on exotic substrates insensitive to their kind and shape. Furthermore, the original salt wafers can be recycled for additional growths, confirming high process sustainability and scalability. The generality and versatility of this approach have been demonstrated by developing proof-of-concept "all 2D" devices for diverse yet unconventional applications. This study is believed to shed a light on leveraging opportunities of 2D TMD layers toward achieving large-area mechanically reconfigurable devices of various form factors at the industrially demanded scale.