Direct electron- beam patterning of transferrable plasmonic gold nanoparticles using a HAuCl4/ PVP composite resist
Direct electron- beam patterning of transferrable plasmonic gold nanoparticles using a HAuCl4/ PVP composite resist
复制标题
使用 HAuCl4/PVP 复合抗蚀剂对可转移等离子体金纳米颗粒进行直接电子束图案化
DOI：
10.1039/c8nr09254k
复制
发表时间：
2019-01-21
期刊：
影响因子：
6.7
通讯作者：
Duan, Huigao
中科院分区：
文献类型：
--
作者：
Bi, Kaixi;Chen, Yiqin;Duan, Huigao
可靠地制造具有所需尺寸、几何形状和空间排列的金纳米粒子对于等离子体应用至关重要。常见的制造流程通常涉及电子束光刻和基于真空蒸发的剥离工艺或蚀刻。在这项工作中，我们评估了一种替代方法，通过使用氯金酸/聚（乙烯基吡咯烷酮）（HAuCl4/PVP）混合物作为功能性电子束抗蚀剂，直接制造等离子体金纳米颗粒阵列，而不涉及真空蒸发过程。进行了系统实验来研究制造过程中的图案化行为。通过优化的制造参数，我们表明HAuCl4/PVP复合光刻胶具有较高的图案分辨率，并且在基于退火的热解过程后可以获得数十纳米的纯金纳米粒子。更具体地，与通过传统方法获得的图案化等离子体金纳米粒子相比，通过我们的方法制造的金纳米粒子由于不存在粘附层而可以转移到软基底上，从而在柔性和可拉伸光学中实现各种潜在应用。作为一个例子，我们证明了转移的金纳米颗粒阵列可以一致地组装到平坦的金表面上，形成用于表面增强拉曼散射（SERS）应用的颗粒薄膜结构。
Reliable fabrication of gold nanoparticles with desirable size, geometry and spatial arrangement is essential for plasmonic applications. A common fabrication flow usually involves electron-beam lithography and a vacuum-evaporation-based lift-off process or etching. In this work, we evaluate an alternative approach to directly fabricate a plasmonic gold nanoparticle array without involving the vacuum evaporation process by using a chloroauric acid/poly(vinyl pyrrolidone) (HAuCl4/PVP) hybrid as a functional electron-beam resist. Systematic experiments were conducted to investigate the patterning behaviors in the fabrication process. With the optimized fabrication parameters, we show that the HAuCl4/PVP composite resist has a high patterning resolution and pure gold nanoparticles with tens of nanometers can be obtained after an annealing-based pyrolysis process. More particularly, compared to the patterned plasmonic gold nanoparticles obtained by conventional methods, the gold nanoparticles fabricated by our method can be transferred to soft substrates due to the absence of an adhesion layer, enabling various potential applications in flexible and stretchable optics. As an example, we demonstrated that the transferred gold nanoparticle array can be conformably assembled onto a flat gold surface to form a particle-on-film structure for surface-enhanced Raman scattering (SERS) applications.