Questionnaire Survey on Ultra-Precision Positioning
Questionnaire Survey on Ultra-Precision Positioning
复制标题
超精密定位问卷调查
DOI：
10.20965/ijat.2011.p0766
复制
发表时间：
2011
期刊：
影响因子：
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通讯作者：
Yasuji Oohashi
中科院分区：
文献类型：
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作者：
T. Oiwa;Masahide Katsuki;M. Karita;Wei Gao;S. Makinouchi;Kaiji Sato;Yasuji Oohashi
自1986年以来，每四年进行七次超精密定位问卷调查。本文介绍了调查结果。根据问卷调查，得到以下结果。 “精密”和“超精密”的平均识别水平分别约为1μm和10nm。虽然定位精度目前处于发展极限，但未来有望实现小于1纳米的精度。由于对更高速度和加速度以及更长行程的需求逐年增加，直线电机驱动越来越受欢迎。位移传感器的性能得到了显着提高。特别是，出于实际原因，最常采用线性标度单位。由于最近人们对环境问题的关注越来越多，用电磁致动器代替液压致动器以节省润滑油的情况变得越来越普遍。
Questionnaire surveys on the ultra-precision positioning have been held seven times every four years since 1986. This paper presents the results of the surveys. According to the questionnaires, the following results were obtained. Averaged recognition levels of "precision" and "ultra-precision" are approximately 1 μm and 10 nm, respectively. Although the positioning accuracy is currently at the limit of development, the accuracy of less than 1 nm is expected in the future. Because the demand for higher speed and acceleration, as well as a longer stroke is increasing year by year, the linear motor drive is getting more popular. Performance of displacement sensors has been considerably improved. In particular, a linear scale unit is most often adopted for practical reasons. Because a concern has recently arisen regarding environmental issues, the replacement of hydraulic actuators with electromagnetic actuators, sparing the use of lubricating oil, is becoming more common.
第一年和第十年
DOI：
--
发表时间：
2013
期刊：
教員養成セミナー(時事通信社)
影响因子：
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作者：
前原吾朗;Jason Bell;仲田康一;植竹丘;Yuki Fukuoka;八尾祥平;前原吾朗;仲田康一;福岡侑希;植竹丘;仲田康一;八尾祥平;植竹丘;Yuki Fukuoka (with Ina Choi);前原吾朗;八尾祥平;植竹丘;仲田康一;Yuki Fukuoka;前原吾朗;八尾祥平;仲田康一;植竹丘;Yuki Fukuoka;吉原和男;植竹丘;Yuki Fukuoka;仲田康一;植竹丘;谷富夫;仲田康一;植竹丘;中山賢司;八尾祥平;仲田康一;植竹丘;蘭信三;中山賢司;植竹丘;中山賢司;相澤真一・小山裕・鄭佳月;植竹丘;相澤真一・小山裕;東京大学社会科学研究所 社会調査・データアーカイブ研究センター（編）;中山 賢司;中山 賢司;植竹丘;中山 賢司;中山賢司;植竹丘;仲田康一;中山賢司;植竹丘;中山 賢司;仲田康一;中山 賢司;植竹丘
通讯作者：
植竹丘