SCALING OF THE DROPLET-SIZE DISTRIBUTION IN VAPOR-DEPOSITED THIN-FILMS
SCALING OF THE DROPLET-SIZE DISTRIBUTION IN VAPOR-DEPOSITED THIN-FILMS
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DOI：
10.1103/physrevlett.61.428
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发表时间：
1988-07-25
影响因子：
8.6
通讯作者：
MEAKIN, P
中科院分区：
文献类型：
--
作者：
FAMILY, F;MEAKIN, P
发展了一种动态标度方法来描述气相沉积薄膜中液滴的尺寸分布以及液滴是通过液滴的成核、生长和合并而形成的。精确计算了描述液滴尺寸分布标度的指数和平均液滴尺寸的增长规律。提出了一种既真实又简单的液滴生长模型。模拟数据与气相沉积TiN的实验数据和d=1、2、3的理论预测值相吻合。
A dynamic-scaling approach is developed for the description of the droplet-size distribution in vapor-deposited thin films and processes where droplets are formed by nucleation, growth, and coalescence of the droplets. The exponent describing the scaling of the droplet-size distribution and the growth law for the mean droplet size are calculated exactly. A realistic, yet simple, droplet-growth model is developed. The simulation data are found to be consistent with the experiments on vapor-deposited tin and with the theoretical predictions in d= 1, 2, and 3.