Direct comparison of experimental and theoretical results on the antenna loading and density jumps in a high pressure helicon source
Direct comparison of experimental and theoretical results on the antenna loading and density jumps in a high pressure helicon source
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高压螺旋源中天线负载和密度跃变的实验结果和理论结果的直接比较
DOI：
10.1088/0741-3335/42/8/301
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发表时间：
2000
影响因子：
2.2
通讯作者：
K. P. Shamrai
中科院分区：
文献类型：
--
作者：
S. Shinohara;K. P. Shamrai
本文从实验和理论上研究了双m = 0天线在51和6mTorr氩气高压下的螺旋放电工作模式。放电的行为，包括突然的密度跳跃，被发现强烈依赖于天线回路中的电流的相对方向（天线频谱上）。实验结果解释的理论，认为射频功率吸收与适当的考虑到螺旋波到静电波的转换。计算等离子体负载电阻对等离子体密度和输入功率的依赖关系，以及磁场分布令人满意地同意在很宽的操作参数范围内的实验数据。从功率平衡考虑估计的密度跳跃的概率也与实验值一致。
Operation modes of helicon discharge excited by double m = 0 antenna at high argon pressures of 51 and 6 mTorr are examined experimentally and theoretically. The behaviour of the discharge, including abrupt density jumps, is found to depend strongly on the relative directions of the currents in the antenna loops (on the antenna spectrum). Experimental results are interpreted in terms of theory which considers the radio frequency power absorption with due regard to the conversion of helicon waves into electrostatic waves. Computed dependences of the plasma load resistance on plasma density and input power, and magnetic field profiles satisfactorily agree with experimental data over a wide range of operation parameters. Thresholds for density jumps estimated from the power balance consideration are also in agreement with experimental values.