Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry
Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry
复制标题
用斐索干涉法测量 XUV 衍射光栅的本征分辨率
DOI：
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
P. Abbamonte
中科院分区：
文献类型：
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作者：
S. Gleason;J. Manton;J. Sheung;T. Byrum;Cody Jensen;Lingyun Jiang;J. Dvorak;I. Jarrige;P. Abbamonte
本文介绍一种用斐索干涉法测量衍射光栅本征分辨本领的方法。该方法比基于长道剖面仪（LTP）的传统技术更精确，因为它对d-间距图未显示的长距离相位误差敏感。我们证明了来自Inprentus公司的机械规则XUV光栅的50，400分辨率。
We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.