A microcalorimeter EDS system suitable for low acceleration voltage analysis
A microcalorimeter EDS system suitable for low acceleration voltage analysis
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适合低加速电压分析的微量热仪EDS系统
DOI：
10.1002/sia.2408
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发表时间：
2006
影响因子：
1.7
通讯作者：
S. Nakayama
中科院分区：
文献类型：
--
作者：
Keiichi Tanaka;A. Odawara;A. Nagata;Masanori Ikeda;Yukari Baba;S. Nakayama
当使用扫描电子显微镜（SEM）进行分析时，必须使用较低的加速电压来减少对样品的损伤并获得样品表面附近的信息。在此基础上，研制了一种无外源冷剂的微热量能谱仪（EDS）系统，用于分析材料样品在低加速电压（<5 kV）下的高能量分辨率（<20 eV）。该EDS系统可以将组成微热量计系统的过渡边缘X射线传感器（TES）的工作温度连续保持在100 mK，以高重现性和高能量分辨率测量X射线光谱。该系统类似于传统的EDS系统，但也有一个喷嘴，使X射线探测器接近样品。测量的能量分辨率为19 eV (5.9 keV)，计数率为300 cps。设计了一种薄的铝/聚酰亚胺双层X射线窗口，用于在低加速电压（5 keV）下传输X射线。当在小于3 kV的加速电压下使用EDS系统分析SUS - 304时，Cr Lα (573 eV)可以在O Kα (525 eV)和Fe Ll （615 eV）线之间区分开来，而当使用固态探测器（SSD）时，由于能量分辨率不足（130 eV）而无法区分。版权所有©2006约翰威利父子有限公司
When a scanning electron microscope (SEM) is used for analysis, a low acceleration voltage must be used to reduce damage to the sample and to obtain information near the sample surface. Here, a microcalorimeter energy dispersive spectrometer (EDS) system without external cryogen was developed to analyze material samples under low acceleration voltages (<5 kV) with high energy resolution (<20 eV). This EDS system can maintain the operating temperature of the transition edge X‐ray sensor (TES) composing of the microcalorimeter system continuously at 100 mK to measure the X‐ray spectrum with high reproducibility and with high energy resolution. This system resembles a conventional EDS system, but also has a snout to allow the X‐ray detector to be close to the sample. The measured energy resolution was 19 eV (5.9 keV) and the count rate was 300 cps. A thin X‐ray window of aluminum/polyimide bilayer was designed to transmit the X rays at a low acceleration voltage (5 keV). When SUS‐304 was analyzed using this EDS system at an acceleration voltage less than 3 kV, the Cr Lα (573 eV) was distinguished between the closely spaced O Kα (525 eV) and Fe Ll (615 eV)lines, whereas when a solid‐state detector(SSD) was used, it was not distinguished owing to inadequate energy resolution (130 eV). Copyright © 2006 John Wiley & Sons, Ltd.