Quasi-confocal extended field surface sensing
Quasi-confocal extended field surface sensing
复制标题
准共焦扩展场表面传感
DOI：
10.1117/12.450093
复制
发表时间：
2001
影响因子：
4.6
通讯作者：
P. Crepin
中科院分区：
文献类型：
--
作者：
J. Cohen;Jérôme Gaillard;P. Crepin
一种新型的光电装置基于准共焦，z轴扩展领域，专有设计已开发的高分辨率非接触三维表面测量，包括粗糙度表征和表面缺陷检测。
A novel optoelectronic setup based on a quasi confocal, z- axis extended field, proprietary design has been developed for High Resolution Non Contact 3D Surface Metrology including roughness characterization and surface flaw detection.