Electrohydrodynamic Micro-/Nanostructuring Processes Based on Prepatterned Polymer and Prepatterned Template
Electrohydrodynamic Micro-/Nanostructuring Processes Based on Prepatterned Polymer and Prepatterned Template
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基于预图案聚合物和预图案模板的电流体微/纳米结构工艺
DOI：
10.1021/ma402456u
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发表时间：
2014-02-25
期刊：
影响因子：
5.5
通讯作者：
Hu, Hong
中科院分区：
文献类型：
--
作者：
Tian, Hongmiao;Shao, Jinyou;Hu, Hong
广泛研究的电诱导微/纳米结构工艺一般是利用预模式化电极在初始平坦的聚合物表面产生空间调制电场，从而产生不均匀的聚合物变形，导致低纵横比的结构，有利于模板图案。然而，本文提出的这一过程的一种变体，即在最初预模式化的聚合物上使用平面电极，也可以产生空间调制电场。本文基于电流体力学模拟和实验结果，对比研究了这两种方法在高纵横比微结构中的适用性，结果表明，在相同的实验条件下，所提出的方法可以提供更强的电调制，因此更适合于高纵横比的微纳结构。
As widely studied, the electrically induced micro-/nanostructuring process generally uses a prepatterned electrode to generate a spatially modulated electric field on an initially flat polymer surface to produce a nonuniform polymer deformation, leading to a structure with low aspect ratio, positive to the template pattern. However, a variant to this process that is proposed in this paper, which uses a flat electrode over an initially prepatterned polymer, can also generate the spatially modulated electric field. This paper presents a comparative study on the applicability of these two processes for microstructuring with high aspect ratio based on observations from our electrohydrodynamic simulation and experiment and shows that the proposed approach can provide a stronger electric modulation for the same experimental settings, therefore being more suitable for micro/nanostructuring with high aspect ratio.