Design and Fabrication of Temperature Sensor for Weather Monitoring System using MEMS Technology
Design and Fabrication of Temperature Sensor for Weather Monitoring System using MEMS Technology
复制标题
采用MEMS技术的天气监测系统温度传感器的设计与制作
DOI：
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发表时间：
2018
影响因子：
0.5
通讯作者：
Jagadish R
中科院分区：
文献类型：
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作者：
Veeramani P.;V. Juliet A.;Sam Jebakumar J.;Jagadish R
本文设计并制作了一种应用于对流层气象监测系统的微电子机械系统（MEMS）温度传感器。在这个设计中，我们使用了曲折的形状，因为它很容易改变长度。我们在这个设计中优化了长度。由于钼材料具有成本低、易得、熔点和沸点高等优点，因此用于本设计的制造。四个弯折式温度传感器分别设计成6.7mm× 4 mm、9.5mm× 4 mm、5.2mm× 4 mm、6.5mm× 4 mm四种尺寸。上述四种传感器的电阻温度系数（TCR）值分别为3.4 ×10- 4C-1、3.7×10- 4C-1、7.0×10- 4C-1、7.5×10- 4C-1。对于无线电探空仪应用，传感器必须具有高灵敏度、高准确度、良好的线性度和更好的TCR值。在6.7mm × 4 mm的尺寸下，实验结果较好。并将实际计算结果与理论计算值进行了比较。
In this paper, Micro Electro Mechanical System (MEMS) based temperature sensor is designed and fabricated for weather monitoring system at troposphere level. In this design we have used meander shape, because it is easy to vary the length. We have optimized the length in this design. Due to certain advantages like low cost, easily available, high melting and boiling point, molybdenum material is used for fabrication of this design. The four meander type temperature sensors are designed with various dimensions of sizes in 6.7mm×4mm, 9.5mm×4mm, 5.2mm×4mm, 6.5mm×4mm. The Temperature Coefficient of Resistance (TCR) values for four various sensors mentioned above are 3.4 ×10-4 C-1, 3.7×10-4 C-1, 7.0×10-4 C-1, 7.5×10-4 C-1. For radiosonde applications the sensor must have high sensitivity, high degree of accuracy, good linearity and with better TCR values. The experimental results are better for dimension 6.7mm ×4mm for all characteristics mentioned above. The practical results are compared with the theoretical values.