Comparison of High-Resolution Patterning Technologies for LTCC Microwave Circuits
Comparison of High-Resolution Patterning Technologies for LTCC Microwave Circuits
复制标题
LTCC 微波电路高分辨率图案化技术比较
DOI：
--
复制
发表时间：
2007
期刊：
影响因子：
--
通讯作者：
A. Molke
中科院分区：
文献类型：
--
作者：
J. Muller;R. Perrone;K.;R. Stephan;J. Trabert;M. Hein;D. Schwanke;J. Pohlner;G. Reppe;R. Kulke;P. Uhlig;A. Jacob;T. Baras;A. Molke
低温共烧陶瓷（LTCC）在宽带和微波电路中得到广泛的认可。在项目财团KERAMIS中，正在研究LTCC基板中更高功能的实现。考虑的应用包括4 × 4开关矩阵[1]、压控振荡器[2]和Ka波段多媒体卫星通信放大器。为了增加更多的功能（例如，滤波器、耦合器），需要扩展线宽和线间隔的电流图案化限制。四种不同的技术被认为是更高的分辨率：a）细线印刷技术与特殊的屏幕，B）光成像膏，c）蚀刻厚膜导体（共烧和后烧），和d）LTCC上的薄膜。图案化技术的评估是基于联盟成员设计和制造的测试样品。该作品包含线，线过渡，环形谐振器（微带和带状线），边缘耦合滤波器，直流阻塞结构，以及各种直流电阻测试线。最小间隙定义为50 μm。研究中包括两种基板材料，Du蓬特带951和943。除了该项目中感兴趣的主要频段（17-22 GHz）外，这些结构的特征高达50 GHz。电气结果与结构的物理测量（线宽、间距和公差）相关，并从性能、可制造性和成品率方面进行评估。结果显示出优异的性能，丝网印刷的结构，并证明了掩模调整，以实现最佳分辨率（蚀刻等）的重要性。
Low-temperature co-fired ceramic (LTCC) are widely acknowledged for wide-band and microwave circuits. Within the project consortium KERAMIS, implementation of higher functionality in LTCC substrates is being investigated. Among the applications considered are a 4 × 4 switch matrix [1], voltage-controlled oscillators [2], and amplifiers for multimedia satellite communications working in Ka-band. In order to add more functionality (e.g., filters, couplers) in LTCC, current patterning limits of line width and line separation need to be extended. Four different technologies were considered for higher resolution: a) fine-line printing technology with special screens, b) photo-imageable pastes, c) etching of thick-film conductors (co- and post-fired), and d) thin films on LTCC. Evaluation of patterning technologies is based on a test coupon that was designed and manufactured by the consortium members. The artwork contains lines, line transitions, ring resonators (microstrip and stripline), edge-coupled filters, DC blocking structures, and various lines for DC resistance testing. The smallest gap definition is 50 μm. Two substrate materials, Du Pont tapes 951 and 943, are included in the study. In addition to the main frequency band of interest in the project (17-22 GHz), these structures have been characterized up to 50 GHz. Electrical results are correlated to physical measurements of the structures (line width, spaces, and tolerances) and are evaluated with respect to performance, manufacturability, and yield. Results show excellent performance for screen-printed structures and demonstrated the importance of mask tuning to achieve optimum resolution (under etching etc.).