Straightness measurement system based on phase sensitive detection technique
Straightness measurement system based on phase sensitive detection technique
复制标题
基于相敏检测技术的直线度测量系统
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
Haoyun Wei
中科院分区：
文献类型：
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作者：
P. Huang;Yan Li;Haoyun Wei
提出了一种基于相敏检测技术的直线度误差测量方法。该系统由单模光纤尾纤激光二极管、角隅棱镜、位置敏感探测器（PSD）和电子元件1组成。单模光纤输出的光束稳定，经准直后可作为直线度误差测量的基准。PSD用于接收由角隅棱镜反射的光束。为了消除背景光的影响，采用正弦波电流调制半导体激光器，并采用相敏检波技术解调信号。与激光干涉仪相比，测量精度优于±0.4 μm。通过对一个平台进行三次重复性测试来评估系统的稳定性，结果表明重复性优于1 μm。该系统可方便地组装在车间内进行小车直线度误差的测量。1 μm。该系统可方便地组装在车间内进行小车直线度误差的测量。
This paper presents a measurement method for straightness errors based on phase sensitive detection technique. This system consists of a single-mode fiber pigtailed laser diode, a corner cube, a position sensitive detector (PSD), and electronic components1. The beam from single mode fiber is stable, which can be used as a datum for straightness error measurement after collimation. The PSD is used to receive the beam reflected by the corner cube. To eliminate the influence of background light, the laser diode is modulated by a sinusoidal wave current and phase sensitive detection technique is developed to demodulate the signal. Compared with a laser interferometer, the measurement accuracy is better than ±0.4 μm. A repeatability test is conducted to assess the system stability by measuring a stage three times, showing that the repeatability is better than 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop. 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop.