Application of the high-Q bouncing ball model based on Fabry-Perot cavity for alcohol gas concentration detection
Application of the high-Q bouncing ball model based on Fabry-Perot cavity for alcohol gas concentration detection
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DOI：
10.1016/j.sna.2023.114721
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发表时间：
2023-10-26
影响因子：
4.6
通讯作者：
Sang，Shengbo
中科院分区：
文献类型：
--
作者：
Sang，Luxiao;Wang，Teng;Sang，Shengbo
提出了一种利用硅与空气形成的垂直介质界面（DI）来提高法布里-珀罗腔Q值的方法，该界面产生一个弹跳球模型。该方法可用于高分辨率的酒精气体浓度检测。具体来说，我们将450 μ m厚的硅片放入法布里-珀罗（FP）腔中，并以一定的倾斜角度放置。这种增加大大增强了光与物质的相互作用，有效地将光限制在腔内。在0-1°倾角范围内，带DI的FP腔的Q值总是高于开放FP腔的Q值。此外，具有DI的FP腔的有效模面积更小。此外，具有DI的FP腔减小了有效模面积，并且减小了在开放FP腔中经历的横向走离损耗。最后，通过检测28.5 ~ 142.5ppm范围内的酒精气体，实验验证了该方法的有效性，并将aQ因子从5.9 × 104提高到1.2 × 105。系统灵敏度计算为0.5294 pm/ppm，获得的分辨率为28.5 ppm。
This paper presents a method to enhance theQfactor of Fabry-P é rot cavities using a vertical dielectric interface (DI) made of silicon and air, which generates a bouncing ball model. The method is applied to detect alcohol gas concentrations with high resolution. Specifically, we introduce a 450 µm-thick silicon wafer into the Fabry-P é rot (FP) cavity, where it is positioned at an angle of inclination. This addition considerably augments the light-matter interaction, effectively confining the light within the cavity. TheQfactor of the FP cavity with DI is always higher than that of the open FP cavity in the inclination angle range of 0–1°. Moreover, the effective mode area of the FP cavity with DI is smaller. Furthermore, the FP cavity with DI reduces the effective mode area and diminishes the lateral walk-off loss experienced in the open FP cavity. Finally, we experimentally verified the effectiveness of this method by detecting alcohol gas concentrations ranging from 28.5 ppm to 142.5 ppm and achieving aQfactor improvement from 5.9 × 104to 1.2 × 105. The system sensitivity was calculated to be 0.5294 pm/ppm, and the resolution obtained was 28.5 ppm.