Azimuthally symmetric pseudosurface and helicon wave propagation in an inductively coupled plasma at low magnetic field
Azimuthally symmetric pseudosurface and helicon wave propagation in an inductively coupled plasma at low magnetic field
复制标题
低磁场下感应耦合等离子体中的方位对称赝面和螺旋波传播
DOI：
10.1063/1.873040
复制
发表时间：
1998
影响因子：
2.2
通讯作者：
Gon
中科院分区：
文献类型：
--
作者：
T. Lho;N. Hershkowitz;John R. Miller;W. Steer;Gon
在轴向均匀低B场作用下，在感应Ar等离子体源中观察到了从电容耦合模（E模）到感应耦合模（H模）的模式转变。所施加的基本射频为13.56 MHz，观察到许多谐波分量。在不同密度（n = 9.0×1010-2.2×1011 cm-3）和B场（12-28 G）下测量了方位对称（m=0模式）的第一和第二谐波赝面和螺旋波的拍波和驻波图案。在临界条件下（ωc/ω>3.0和n = 2.2×1011 cm−3），观察到了波传播模式的变化，从伪表面波到螺旋波，以及从螺旋波到伪表面波。
The mode transition from a capacitively coupled mode (E mode) to an inductively coupled mode (H mode) was observed in an inductive Ar plasma source by applying an axially uniform low B field. The applied fundamental rf was 13.56 MHz and many harmonic components were observed. A beat and standing wave patterns of azimuthally symmetric (m=0 mode) first and second harmonic pseudosurfaces and helicon waves were measured at various densities (n∼9.0×1010–2.2×1011 cm−3) and B fields (12–28 G). Wave propagation mode changes, from pseudosurface to helicon waves and from helicon to pseudosurface waves, were observed at critical conditions, ωc/ω>3.0 and n∼2.2×1011 cm−3.