Takahiro Namazu, Yoshitada Isono and Takeshi Tanaka: "Evaluation of Size Effect on Mechanical Properties of Single Crystal Silicon by Nano-Scale Bending Test using AFM"Journal of Micro Electro Mechanical Systems, IEEE. Vol.9,No.4. 450-459 (2000)
Takahiro Namazu, Yoshitada Isono and Takeshi Tanaka: "Evaluation of Size Effect on Mechanical Properties of Single Crystal Silicon by Nano-Scale Bending Test using AFM"Journal of Micro Electro Mechanical Systems, IEEE. Vol.9,No.4. 450-459 (2000)
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Takahiro Namazu、Yoshitada Isono 和 Takeshi Tanaka:“使用 AFM 进行纳米级弯曲测试来评估单晶硅机械性能的尺寸效应”微机电系统杂志,IEEE。
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