Preparation of cross‐sectional TEM samples for low‐angle ion milling
Preparation of cross‐sectional TEM samples for low‐angle ion milling
复制标题
用于低角度离子铣削的横截面 TEM 样品的制备
DOI：
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
Á. Barna
中科院分区：
文献类型：
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作者：
J. McCaffrey;Á. Barna
理想的离子研磨透射电子显微镜（TEM）样品将在选定区域中包含大而薄的区域，最小的顶表面和底表面非晶化，以及相邻材料的最小优先蚀刻。这种愿望导致了对这些效应的研究以及对离子米尔斯的设计和技术的改进。已发现使离子束到样品表面的入射角最小化是满足这些要求的最有效的技术之一。新一代离子米尔斯最近被设计成允许低角度离子铣削，用于生产非常高质量的横截面TEM样品。为了充分利用这些米尔斯中的低角度离子铣削能力和高功率离子源，需要新的样品制备技术。本文介绍了一种简单的技术，将材料安装在专门的钛网格中，用于横截面TEM样品制备。该技术旨在充分利用这些新型低角度离子米尔斯的强大功能。Microsc. Res. Tech. 36：362-367，1997.©1997 Wiley利斯公司
The ideal ion‐milled transmission electron microscope (TEM) sample would contain large, thin areas in selected regions, minimal top and bottom surface amorphization, and minimal preferential etching of adjacent materials. This desire has led to studies of these effects and improvements in designs and techniques for ion mills. Minimizing the incident angle of the ion beam to the surface of the sample has been found to be one of the most effective techniques for fulfilling these requirements. A new generation of ion mills has recently been designed to allow low‐angle ion milling for the production of very high quality cross‐sectional TEM samples. To take advantage of the low‐angle ion milling capabilities and high‐powered ion sources in these mills, new sample preparation techniques are required. In this paper, a simple technique of mounting material in a specialized titanium grid for cross‐sectional TEM sample preparation is presented. This technique is designed to take full advantage of the powerful capabilities of these new low‐angle ion mills. Microsc. Res. Tech. 36:362–367, 1997. ©1997 Wiley‐Liss, Inc.