Quasi-monolithic heterodyne laser interferometer for inertial sensing
Quasi-monolithic heterodyne laser interferometer for inertial sensing
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DOI：
10.1364/ol.473476
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发表时间：
2022-10-01
期刊：
影响因子：
3.6
通讯作者：
Guzman, Felipe
中科院分区：
文献类型：
--
作者：
Zhang, Yanqi;Guzman, Felipe
本文介绍一种用于高灵敏度位移传感的小型外差式激光干涉仪。这种干涉仪由定制的棱镜和波片组装成一个准单片单元，以实现小型化系统。干涉仪设计采用共模抑制方案，对常见环境噪声提供高抑制比。在根真空中的实验测试表明，位移灵敏度水平为11 pm/根Hz在100 mHz和低至0.6 pm/Hz以上1 pm。原型单元的尺寸为20 mm x 20 mm x 10 mm，重4.5 g，允许随后集成到紧凑的系统中。(c)2022光学出版集团
We present a compact heterodyne laser interferometer devel-oped for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in root vacuum show a displacement sensitivity level of 11 pm/ root Hz at 100 mHz and as low as 0.6 pm/Hz above 1 pm. The pro-totype unit is 20 mm x 20 mm x 10 mm in size and weighs 4.5 g, allowing subsequent integration in compact systems.(c) 2022 Optica Publishing Group