Fine scale piezoelectric 1-3 composites: a new approach of cost effective fabrication
Fine scale piezoelectric 1-3 composites: a new approach of cost effective fabrication
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精细尺寸压电 1-3 复合材料：一种经济有效的制造新方法
DOI：
10.1109/isaf.1998.786716
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
W. Gebhardt
中科院分区：
文献类型：
--
作者：
S. Starke;A. Schonecker;W. Gebhardt
提出了一种制备1-3型复合材料频率/spl ges/5 MHz换能器的新方法。该方法使用通过微系统技术（例如微机械加工、化学或等离子蚀刻）构造的母模。从这个模具模板的软聚合物已采取。它们被陶瓷片渗透了。干燥后，陶瓷绿色坯体可脱模而不损失传递模具。描述了这种所谓的“软模”方法的工艺步骤。本文报道了边长为85 /spl mu/m和145 /spl mu/m的方棒1-3复合材料的初步结果。复合材料显示出高的耦合系数k/sub t/，分别为0.71和0.79。
A new method of fabricating 1-3 composites for transducer applications at frequencies /spl ges/5 MHz has been developed. This method uses a master mold which has been structured by microsystems technologies such as micromachining, chemical or plasma etching. From this mold templates of a soft polymer have been taken. They were infiltrated with a ceramic slip. After drying the ceramic green body could be demolded without loss of the transfer mold. The process steps of this so called "soft mold" method are described. First results on 1-3 composites with square rods of 85 /spl mu/m and 145 /spl mu/m edge length are reported. The composites showed high coupling coefficients k/sub t/, of 0.71 and 0.79, respectively.