Titanium oxide/aluminum oxide multilayer reflectors for "water-window" wavelengths
Titanium oxide/aluminum oxide multilayer reflectors for "water-window" wavelengths
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DOI：
10.1063/1.118898
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发表时间：
1997-05
影响因子：
4
通讯作者：
H. Kumagai;K. Toyoda;K. Kobayashi;M. Obara;Y. Iimura
中科院分区：
文献类型：
--
作者：
H. Kumagai;K. Toyoda;K. Kobayashi;M. Obara;Y. Iimura
采用表面化学反应控制生长的原子层沉积方法，在硅衬底上制备了20层厚度为4.43 nm的二氧化钛和氧化铝双层膜，用于水窗波长的新型多层膜反射器。实验证明，在入射波长为2.734 nm、入射角为71.80°时，反射率可达30%以上。在2.734 nm处的反射率半高全宽为0.0381 nm，相当于Δλ/λ=1.4%。
Twenty bilayers of titanium oxide and aluminum oxide with the layer-pair thickness of 4.43 nm on a silicon substrate were fabricated for novel multilayer reflectors at water-window wavelengths by an atomic layer deposition method of controlled growth with sequential surface chemical reactions. The high reflectance of over 30% at a wavelength of 2.734 nm and an incident angle of 71.8° from the normal incidence was demonstrated experimentally. The full width at half-maximum of the reflectances at 2.734 nm was 0.0381 nm, which corresponds to Δλ/λ=1.4%.