Encapsulation of organic field effect transistors for flexible biomedical microimplants
Encapsulation of organic field effect transistors for flexible biomedical microimplants
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DOI：
10.1016/j.sna.2004.11.021
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发表时间：
2005-04-29
影响因子：
4.6
通讯作者：
Stieglitz, T
中科院分区：
文献类型：
--
作者：
Feili, D;Schuettler, M;Stieglitz, T
生物医学微植入物被用作神经假体，通过功能性电刺激（FES）恢复截瘫后的身体功能。本文介绍了一种将有机晶体管集成到柔性生物医用微植入体中的方法。封装用于确保植入物的电气功能（绝缘），并保护它们免受人体恶劣环境的影响。到目前为止，生物医学微器件已经分别使用硅或聚酰亚胺衬底制造。已经作为神经假体与神经接合的高度柔性的基于聚酰亚胺的微型器件显示出作为植入材料的优异性能[1-3]。因此，我们开发了聚酰亚胺晶体管，用作柔性基板。溅射金作为栅极、漏极和源极。在超高真空（UHV）和75 ℃衬底温度下蒸发氧化硅形成栅极绝缘体，并五苯（C14 H22）作为有机场效应晶体管（OFET）中的有源层。聚对二甲苯用作封装材料。第一晶体管已经制造和表征。到目前为止，它们仍然处于低规模集成。在室温下用聚对二甲苯封装之前和之后，对OFFEX的电性能的第一次调查导致了有希望的结果。(c)2004 Elsevier B. V.保留所有权利。
Biomedical microimplants are used as neural prostheses to restore body functions after paraplegia by means of functional electrical stimulation (FES). This paper describes an approach of the integration of organic transistors into flexible biomedical microimplant for FES use. Encapsulation is used to ensure the electrical functionality of implants (insulation) and to protect them from the harsh environments in the human body. So far, biomedical microdevices have been fabricated using silicon or polyimide substrate, respectively. Highly flexible polyimide based microdevices that have been interfaced with nerves as neural prostheses showed excellent properties as implant material [1-3]. Therefore, we have developed transistors on polyimide, which is used as flexible substrate. Gold was sputtered as gate, drain and source. Silicon oxide formed the gate insulator and pentacene (C14H22) was evaporated at ultra high vacuum (UHV) and 75 degrees C substrate temperature as active layer in an organic field effect transistor (OFET). Parylene is used as encapsulation material. First transistors have been fabricated and characterized. So far, they are still in low scale integration. The first investigation on the electrical properties of the OFETs before and after encapsulation with Parylene at room temperature led to promising results. (c) 2004 Elsevier B.V. All rights reserved.