Application of Low Temperature Processed 0-3 Composite Piezoelectric Thick Films in Flexible, Non-planar, High Frequency Ultrasonic Devices.
Application of Low Temperature Processed 0-3 Composite Piezoelectric Thick Films in Flexible, Non-planar, High Frequency Ultrasonic Devices.
复制标题
低温处理的 0-3 复合压电厚膜在柔性非平面高频超声器件中的应用。
DOI：
10.1109/jsen.2023.3251030
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发表时间：
2023
影响因子：
4.3
通讯作者：
LeventDegertekin,F
中科院分区：
文献类型：
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作者：
Bradley,LeeW;Yaras,YusufS;Karahasanoglu,Batin;Atasoy,Begum;LeventDegertekin,F
低温，柔性，0-3复合压电材料可以减少尺寸，成本和复杂性的高频声器件在温度敏感的衬底上，如导管超声器件和声光（AO）传感器。本文报道了低温0-3连接复合厚膜在柔性非平面高频超声器件中的应用。介绍了一种基于压电陶瓷的复合厚膜柔性高频超声换能器和AO射频场传感器。柔性复合薄膜的厚度在20和20之间，使用丝网印刷，模板印刷和浸渍涂层技术。测量了复合膜的压电d33系数，得到了35 ~ 43 pC/N之间的结果。使用这些薄膜的超声波换能器表现出宽带声响应。复合换能器由柔性聚酰亚胺制成，包裹在3毫米导管上。脉冲回波实验证明了这些薄膜在柔性器件中作为致动器和传感器的可行性。将复合材料进一步浸涂在光纤布拉格光栅（FBG）上，形成柔性AO射频场传感器。该传感器演示了20 - 130 mhz范围内的射频场感应。这些实验结果表明，在温度敏感基板上使用低温0-3复合压电材料的未来柔性高频超声器件具有重大潜力。
Low-temperature, flexible, 0–3 composite piezoelectric materials can decrease the size, cost, and complexity of high-frequency acoustic devices on temperature-sensitive substrates such as those in catheter-based ultrasonic devices and acousto-optic (AO) sensors. In this article, the application of low-temperature 0–3 connected composite thick films in flexible, nonplanar, high-frequency ultrasonic devices is reported. A flexible high-frequency ultrasound transducer and an AO radio frequency (RF) field sensor are demonstrated using PZT-based composite thick films. Flexible composite films have been fabricated with thicknesses between 20 andusing screen-printing, stencil-printing, and dip-coating techniques. Composite films’ piezoelectric d33 coefficient is measured, with results between 35 and 43 pC/N. Ultrasonic transducers using these films demonstrate broadband acoustic response. A composite transducer is fabricated on flexible polyimide and wrapped around a 3-mm catheter. Pulse-echo experiments demonstrate the viability of these films both as an actuator and a sensor in flexible devices. The composite material is further dip-coated onto an optical fiber Bragg grating (FBG) to form a flexible AO RF field sensor. The sensor demonstrates RF field sensing in the 20–130-MHz range. The results from these experiments indicate significant potential for future flexible, high-frequency ultrasonic devices using low-temperature 0–3 composite piezoelectric materials on temperature-sensitive substrates.