Development of a low-cost micro-CMM for 3D micro/nano measurements
Development of a low-cost micro-CMM for 3D micro/nano measurements
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DOI：
10.1088/0957-0233/17/3/s12
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发表时间：
2006-03-01
影响因子：
2.4
通讯作者：
Liu, YS
中科院分区：
文献类型：
--
作者：
Fan, KC;Fei, YT;Liu, YS
一种高精度、低成本的微型三坐标测量机正在研制中。预期测量范围为25 x 25 x 10 mm（3），分辨率为1 nm。为了提高结构精度，在设计中引入了一些新的设计思想，如采用拱形桥结构以提高刚度和热精度，采用共面工作台以减小阿贝误差。提出了利用线衍射光栅、干涉仪和细分技术实现纳米级位置传感的方法。激光干涉仪反馈主轴上的聚焦探头采用Z轴结构，保证了纳米级的稳定性。在这份报告中，详细的设计原则，开发的微型坐标测量机进行了说明。对样机的各个模块进行了性能评价。通过对压电陶瓷直线电机的粗、精运动控制相结合，可实现各轴精度达1 nm的定位。Z轴测量的可重复性可控制在15 nm以内。共面工作台的部分定位重复精度达到30 nm。一些问题，由于目前的技术将得到解决。
A high-precision and low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 x 25 x 10 mm(3) and the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness and thermal accuracy, and the co-planar stage for less Abbe error. The linear diffraction grating, interferometer and subdivision technique is proposed for position sensing to nanometre resolution. The focusing probe on the laser interferometer feedback spindle is structured in the Z-axis to guarantee the nanometre stability. In this report, the detailed design principles of the developed micro-CMM are described. The performance evaluation of each module of the prototype micro-CMM is presented. The positioning resolution of each axis to 1 nm can be achieved by combining the coarse and fine motion control on a piezo-ceramic linear motor. The Z-axis measurement can be controlled to within 15 nm repeatability. Parts of the positioning repeatability of the co-planar stage have been achieved to 30 nm. Some problems due to current techniques will be addressed.