CMOS-compatible highly efficient polarization splitter and rotator based on a double-etched directional coupler
CMOS-compatible highly efficient polarization splitter and rotator based on a double-etched directional coupler
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DOI：
10.1364/oe.22.002489
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发表时间：
2014-02-10
期刊：
影响因子：
3.8
通讯作者：
Hochberg, Michael
中科院分区：
文献类型：
--
作者：
Guan, Hang;Novack, Ari;Hochberg, Michael
我们提出了一种高效的偏振分离器和旋转器（PSR），采用248nm深紫外光刻技术在绝缘体上的硅衬底上制造。该PSR基于长度为27 μ m的双蚀刻定向耦合器，制造的PSR产生的tm -TE转换损耗优于0.5 dB， TE插入损耗优于0.3 dB，并且在1540-1570 nm波长范围内具有超低串扰（-20 dB）。(C) 2014年美国光学学会
We present a highly efficient polarization splitter and rotator (PSR), fabricated using 248 nm deep ultraviolet lithography on a silicon-on-insulator substrate. The PSR is based on a double-etched directional coupler with a length of 27 mu m. The fabricated PSR yields a TM-to-TE conversion loss better than 0.5 dB and TE insertion loss better than 0.3 dB, with an ultra-low crosstalk (-20 dB) in the wavelength regime 1540-1570 nm. (C) 2014 Optical Society of America