Stable and environment-hard vacuum nanoelectronic devices for aerospace applications
Stable and environment-hard vacuum nanoelectronic devices for aerospace applications
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用于航空航天应用的稳定且耐环境的真空纳米电子器件
DOI：
10.1088/1757-899x/474/1/012005
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
M. Nakamoto and J. Moon
中科院分区：
文献类型：
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作者：
M. Nakamoto and J. Moon
通过传递模发射极制造方法制备了具有低功函数和耐恶劣环境的极其稳定的场发射极阵列（FEA），可在强自由基气氛等恶劣环境中制造出具有显着耐受性和低工作电压的真空纳米电子器件。使用具有低功函数和环境硬度的非晶碳和氮化钛作为发射极材料。与通过传统方法制造并包含电阻层的普通有限元组件的 5-100% 相比，不具有电阻层的无定形碳有限元组件的电流发射波动低至±1.7%（有史以来报道的最低值）。与涂有氮化钛或铂 (Pt) 的传递模 FEA 相比，非晶碳 FEA 显示出最稳定的发射特性，因为非晶碳 FEA 具有最均匀的尖端半径。无定形碳有限元分析在原位氧自由基处理下表现出小于±5.1%的稳定波动。面板和像素电动推进器已被提议使用传递模有限元分析。这些电动推进器可以轻松生产大型和小型推进器。传递模塑无定形碳有限元分析可用于制造高效可靠的真空电子设备，例如电力推进发动机和场发射显示器。
Extremely stable field-emitter arrays (FEAs) having low work function as well as resisting harsh environments have been prepared by the transfer mold emitter fabrication method to make remarkably resistant and low operation-voltage vacuum nanoelectronic devices in harsh environments such as a strong radical atmosphere. Amorphous carbon and titanium nitride, which have a low work function as well as an environmental hardness, were used as the emitter material. The current emission fluctuations of amorphous carbon FEAs having no resistive layers, were as low as±1.7%,(the lowest ever reported value), as compared to 5–100% of general FEAs fabricated by the conventional method and containing resistive layers. The amorphous carbon FEAs show the most stable emission characteristics, as compared to transfer mold FEAs coated with titanium nitride or platinum (Pt), because amorphous carbon FEAs have the most uniform tip radii. The amorphous carbon FEAs exhibit stable fluctuations of less than±5.1% under in situ oxygen radical treatment. Panel and pixel electric thrusters have been proposed that use transfer mold FEAs. These electric thrusters make it easy to produce large and small thrusters. transfer mold amorphous carbon FEAs can be used to create highly efficient and reliable vacuum electronic devices such as electric propulsion engines and field-emission displays.